Module for a display device and/or operating device, display device and/or operating device, method for producting a module and means of transportation

ABSTRACT

The invention relates to a module (1) for a display and/or operating device (10), the module (1) comprising a first transparent electrode (3) having a first matrix of a plurality of electrode islands (3a, 3b, 3c); a transparent piezoelectric layer (2) having a first and a second area; a second transparent electrode (4); a transparent substrate (12); and a conductive path arrangement having at least a first conductive path (24a) on the transparent piezoelectric layer (2), wherein the transparent substrate (12) is coated with the second transparent electrode (4) and the second transparent electrode (4) is disposed between the transparent substrate and the transparent piezoelectric layer (2), and the first area is coated with the first transparent electrode and the second area is coated with the second transparent electrode (4); and the electrode islands (3a, 3b, 3c) are arranged electrically insulated from one another on the first area of the transparent piezoelectric material (2), wherein at least the first conductive path (24a) of the conductive path arrangement (25) is electrically connected to at least one of the electrode islands (3a, 3b, 3c), and at least the first conductive path (24a) and/or at least one of the electrode islands (3a, 3b, 3c) has a layer thickness from 95 nm to 195 nm.

The invention relates to a module for a display and/or operating device,method of manufacturing a module, display device, and means oftransport.

Currently, a haptic feedback of a display device to a user, inparticular by a vibration when touched by the user, may be realized bymeans of piezo actuators or via the movement of the display and/or thesurface by a magnet or an electric motor. However, the piezo actuatorswith mechanical coupling elements, which are usually not transparent,must be arranged in the peripheral area of the display, since the piezoactuators and the mechanical coupling elements otherwise restrict theview of the display.

US 2012/0313874 A1 and US 2012/0313766 A1 disclose piezo actuatorsattached to the edge of a display device. The piezo actuators arecompletely coated on two sides with continuous electrodes. If a touch ofthe display by an object, e.g. a finger, is detected, an electricalvoltage is applied to the electrodes. This stimulates the piezoactuators to vibrate via the piezoelectric effect and the objecttouching the display device experiences haptic feedback and/or hapticresponse. However, the haptic feedback takes place simultaneously on theentire display. Thus, partial areas of the display cannot beindividually stimulated for haptic feedback. Due to the arrangement ofthe piezo actuators in the edge area of the display, additionalmechanical coupling elements are also required here.

Moreover, known touch surfaces, in particular touch displays, haveanti-reflective surface coatings independent of the embodiment. However,touch sensor technology, haptic actuator technology and anti-reflectivecoatings have to be implemented using different techniques. Thesimultaneous technical realization of a touch sensor technology, ahaptic actuator technology and an anti-reflective coating must becarried out via heterogeneous manufacturing steps and using differentmaterials. As a result, the system properties of touch surfacesmanufactured in this way are limited in terms of their installationspace and haptic effect. Furthermore, increased system and developmentcosts as well as unfavourable quality characteristics arise.

Thus, it is an object of the present invention to provideposition-selective haptic feedback on a display and/or operating devicehaving good anti-reflective properties with reduced manufacturing andmaterial costs, and to alleviate the disadvantages of the aforementionedprior art.

According to the invention, the task is solved by the independentclaims.

According to a first aspect, the present invention relates to a modulefor a display and/or operating device (e.g. for a display device). Inthis context, a “module” is understood to be a component which may bearranged in particular on the area of a display and/or operating devicewhich displays graphical display contents and/or enables directinteraction with the graphical display contents, for example a touchscreen. Further, a “display device” may include a decorative surface. Inparticular, the module may be glued to such an area of the displayand/or operating device. The module is transparent in this respect dueto the features described below. In this context, “transparency” isunderstood to mean, in particular, a colourless transparency, such asthat of a window glass. However, the concept of transparency used hereinrequires at least that the graphically represented contents of a displayof a display and/or operating device must be recognizable and/or visibleto an observer through the module.

The module comprises a transparent substrate coated with a secondtransparent electrode. The second transparent electrode material is inturn coated on its other side with a second area of a transparentpiezoelectric material. Thus, the second electrode is “sandwiched”between the substrate and the transparent piezoelectric material.Further, a first surface of the transparent piezoelectric material iscoated with a first transparent electrode. For example, the first andsecond areas of the transparent piezoelectric layer are parallel. Inother words, the electrodes are arranged on opposite areas of thetransparent piezoelectric layer. Here, the first transparent electrodecomprises a first matrix of electrode islands. In other words, atransparent electrode layer comprising a two-dimensional pattern, thatis, a first matrix of electrode islands, is present on the transparentpiezoelectric material. Electrode islands are to be understood here ascomponents of the first matrix which are insulated from one another(which are in particular arranged spaced apart from one another). Thematrix formed by the electrode islands may be in the form of a “V”and/or a “W” and/or in the form of a “checkerboard pattern” or in theform of a cross. In particular, it is provided that the electrodeislands are spaced apart from each other. Each electrode island may herebe connected to a voltage source. Thus, electrode islands may beunderstood as isolated layers of the transparent material (e.g. indiumtin oxide) of the first electrode, which do not touch each other andwhich are arranged as a two-dimensional pattern distributed on the firstarea of the transparent piezoelectric layer. These layers may bepolygonal, especially rectangular, as well as elliptical. For example,an electrode island may be arranged spaced apart from the edge of thesecond area. This means that the electrode island does not touch theedge of the first area. Furthermore, the module according to theinvention comprises a conductive path arrangement comprising at least afirst conductive path. For example, the conductive path arrangement mayinclude five to 200 conductive paths. Here, at least the firstconductive path is electrically connected to at least one of theelectrode islands. In this regard, the electrode island may be poweredvia a conductive path arrangement comprising at least a first conductivepath having an electrode pad disposed outside the first area and havinga path to a voltage source. Thus, by applying an electrical voltagebetween the first and second electrodes between which the transparentpiezoelectric material is located, a movement, in particular avibration, of the piezoelectric material may be excited via thepiezoelectric effect, which in turn causes the transparent substrate tovibrate. In the case of spacing the electrode island from the edge ofthe first area, haptic feedback may thus be caused at any position ofthe module by the vibration of the transparent substrate. Thus, for auser who is is touching the surface of the module, e.g., with hisfinger, a haptic feedback may be caused at any point of this surface.Site selectivity may be achieved by varying the vibration of the entireplate depending on the finger position. Furthermore, it is possible tocause a position-selective haptic feedback independent of other surfaceareas by position-selective vibration of the transparent substrate byselective control of the electrode islands.

At least the first conductive path and/or one of the electrode islandshas a layer thickness of 95 to 195 nm here. Furthermore, half and/or allof the conductive paths and/or electrode islands may also have a layerthickness of 95 to 195 nm. These reference values for the layerthickness correspond to 380/4 nm and 780/4 nm, respectively, i.e. thereference values of the wavelength range of visible light divided byfour. The layer thickness range of 95 to 195 nm may cause destructiveinterference between the light beams reflected at the conductive pathsand/or electrode islands. The layer thickness as the wavelength of thewave to be cancelled divided by four is known to the person skilled inthe art from the physical condition for destructive interference (see“http://www.chemgapedia.de/vsengine/vlu/vsc/de/ph/14/ep/-einfuehrung/wellenoptik/interferenz2c.vlu/Page/vsc/de/ph/14/ep/einfuehrung/wellenoptik/i2_reflyl.vscml.html”).In this way, the reflection intensity is attenuated, resulting in ananti-reflective surface. Outside the range of 95 nm to 195 nm, there isno destructive interference between the reflected waves of visiblelight, which means that the reflection intensity is not weakenedsufficiently to achieve an anti-reflective effect.

The first and/or the second electrode may, for example, comprisegraphene and/or indium tin oxide (ITO) and/or silver nanowires and/orcarbon nanotubes (CNT) and/or conductive polymers and/or Al-doped ZnOand/or nitrogen-doped diamond-like carbon and/or carbon nanowires.

The layer thickness of the remaining electrodes, in particular of theelectrode islands, and/or conductive paths, which do not have a layerthickness of 95 to 195 nm, may in particular be at least 0.5 nm, e.g.100 to 400 nm, particularly preferably 150 to 300 nm. If the layerthickness of the electrodes, especially the electrode islands, is toolow, haptic feedback is no longer sufficiently perceptible. If the layerthickness of the electrodes, especially the electrode islands, isexceeded, the transparency of the electrode material is no longersufficiently present.

Suitable transparent piezoelectric materials for the piezoelectric layerare in particular lead zirconate titanate (Pb(Zr_(x)Ti_(1-x))O₃) and/orlead titanate (PbTiO₃) and/or barium titanate (BaTiO₃) and/or sodiumniobate (NaNbO₃) and/or potassium niobate (KNbO₃) a lithium-dopedpotassium sodium niobate (K, Na)_(1-x)Li_(x)NbO₃ and/or scandiumaluminium nitride (AlScN). The layer thickness of the piezoelectricmaterial for the piezoelectric layer is in particular 150 to 1500 nm.With smaller layer thicknesses, it may not be possible to applysufficiently high voltages to the piezoelectric layer, while with layerthicknesses that are too high, problems may arise with regard tomechanical layer stresses and reduced transparency.

In particular, the electrode islands may have side lengths and/ordiameters of 20 μm to 500 μm. With smaller side lengths and/ordiameters, disadvantageous space losses in favour of wiring may occur.

Thus, the module for a display and/or operating device may be attachedto the part of the display and/or operating device on which thegraphical display contents are presented and/or offered for interaction(i.e. to the display). For example, the free side, i.e., the uncoatedside of the substrate, may be applied directly to the display of thedisplay and/or operating device. Due to the spatially directly adjacentarrangement of the transparent electrodes to the piezoelectric material,additional mechanical coupling interfaces may thus be dispensed with,which makes the module simpler and more cost-effective to manufacture.Moreover, by spacing at least one electrode island of the first matrixfrom the edge of the first area, any position on the transparent modulemay be used for haptic feedback in a position-selective manner byexciting the piezoelectric material. Furthermore, the transparent moduleaccording to the invention may reduce distortion of graphical displaycontents, which occurs, for example, with the known non-transparentpiezo actuators.

The electrode islands and the conductive paths combine a haptic actuatortechnology and an anti-reflective coating as an integrated approach. Dueto the elimination of additional components, module performance may beimproved. By combining a haptic feedback and an anti-reflective opticswithin an electrode island and/or conductive path, an installation spaceminimization may be achieved compared to known solutions. This reducesdevelopment and system costs and improves quality characteristics byreducing the number of discrete components and/or additional layers.

The subclaims show advantageous further developments of the invention.

In an advantageous further embodiment of the module according to theinvention, the first and second areas of the transparent piezoelectriclayer are parallel to each other. In other words, the first and secondelectrodes are disposed on opposite sides of the transparentpiezoelectric layer.

In this way, an ideal arrangement may be achieved in terms of hapticfeedback.

According to another advantageous further embodiment of the moduleaccording to the invention, at least one of the electrode islands isarranged spaced apart from an edge of the first area. In this case, theelectrode island may be arranged on the center and/or on a quadrant ofthe piezoelectric layer as desired. Further, two or more electrodeislands may be arranged spaced apart from the edge of the first area.Particularly advantageously, all electrode islands are arranged spacedapart from the edge. Here, the electrodes spaced apart from the edge mayhave a line connecting the electrode islands to an electrode pad, whichmay be located at the edge or outside the transparent piezoelectriclayer. Due to the arrangement of the electrode islands spaced apart fromthe edge of the first area, haptic feedback may be generated at anyposition of the module in a position-selective manner.

In a further advantageous embodiment of the module according to theinvention, at least one of the electrode islands has its own independentvoltage path to a voltage source. In other words, for at least one ofthe electrode islands of the first matrix, there exists a separate andindependent circuit path which is configured to electrically connect theelectrode island to a voltage source. This may be, for example, aconductive path connected to an electrode pad as described above. Thiscircuit path further comprises, for example, a transistor and/or aswitch and/or a relay which closes the current path to a voltage sourceindependently of the switching paths of the other electrode islands.Thus, a small region of the module according to the invention may beselectively controlled individually and independently. Furthermore, atleast two, and in particular all, of the electrode islands may also havetheir own respective and independent circuit path to their ownindependent voltage source.

In a further advantageous embodiment, the electrode island comprises anelliptical shape and/or a polygonal shape, in particular a quadrangularshape. For example, a circular shape may also count among the ellipticalshape. Furthermore, point-shaped electrode islands are also conceivable.For example, in the case of quadrangular shapes of the islands, alamellar structure of the first matrix may also be formed.

According to another further embodiment, the second transparentelectrode comprises a second matrix having a plurality of electrodeislands. In order to avoid repetition, all features, effects andadvantages which apply to the first electrode with the first matrix arehereby also referred to the second electrode with the second matrix. Inparticular, the use of a second matrix comprising a plurality ofelectrode islands may reduce the layer stress compared to a full coatingwithin the module according to the invention.

In a preferred embodiment, the electrode islands of the first matrix andthe second matrix are congruent with each other. In this way, aspatially optimized excitation of the piezoelectric layer may beachieved.

In an advantageous further development of the module according to theinvention, the latter comprises an anti-scratch and/or a hydrophobiccoating. In this way, the service life of the electrode islands and/orthe conductive paths may be noticeably increased. Anti-scratch coatings,for example, are scratch-proof varnishings.

In a further advantageous embodiment of the module according to theinvention, the electrode islands have different layer thicknesses in therange from 95 to 195 nm. On the one hand, it is conceivable that theelectrode islands each have constant layer thicknesses, which, however,may be of different thicknesses for different electrode islands. On theother hand, a step structure may be provided within an electrode island,wherein different layer thicknesses are realized within an electrodeisland in the range of 95 to 195 nm. The same may be implemented for theconductive paths. Thus, several wavelengths of visible light may becancelled, which further improves the anti-reflective coating in termsof weakening the intensity of reflection.

The following aspects according to the invention comprise theadvantageous embodiments and further embodiments as well as the generaladvantages of the device according to the invention and the respectivetechnical effects associated therewith.

According to a second aspect, the present invention relates to a methodof manufacturing a module according to the first aspect of theinvention. For this purpose, a transparent substrate, e.g. a glass plateand/or a transparent plastic, is first coated with the secondtransparent electrode. This may be done, for example, by means ofphysical vapour deposition, e.g. sputtering and/or vapour deposition(comprising, for example, sputtering of indium tin oxide). Subsequently,the electrode may be patterned, for example, using a dry etching processor a lithography process. Thereafter, the transparent piezoelectricmaterial (e.g., lead zirconate titanate and/or doped and/or undopedaluminum nitride) is deposited onto the second transparent electrode.This may be done, for example, using a conventional sputtering process.Alternatively, a conventional sol-gel method is also possible, forexample. In the case of the sol-gel method, in particular, a furtherdrying step may take place. In a further step, the transparentpiezoelectric material is coated on its first area with a first matrixof electrode islands, wherein at least one electrode island comprises alayer thickness of 95 to 195 nm. This may be done by sputtering, asdescribed above. The conductive paths, which preferably comprise metalcomponents, are in particular also applied by a physical gas depositionprocess. In particular, a conductive path with a layer thickness of 95nm to 195 nm is applied. This may be achieved, for example, by adjustingthe process parameters, such as the sputtering time. The same applies tothe coating process for creating the electrode islands. Furthermore,steps may be created by means of etching masks. The coating techniqueused here corresponds to the technique used for coating the substrate.The patterning of the coatings may be carried out, for example, by meansof a lithography process and/or a dry etching process. Here, physicalprocesses (e.g. by argon ion bombardment) and/or chemical processes,such as etching with chlorine-containing gases (especially whenpatterning AIN or ScAIN), with the aid of an etching mask areconceivable. Furthermore, patterning may be carried out by means oflaser techniques. In particular, the structure of the conductive pathand/or the piezo material and especially the electrode islands may bedefined. Thus, a module with a haptic-actuator as well as ananti-reflective surface may be produced within one manufacturing processwithout the need for additional production steps and productionmaterials. This allows production costs to be reduced, as materials andprocess steps are saved.

According to a third aspect, the invention relates to a display and/oroperating device comprising a module according to the first aspect. Inthis case, the module is arranged as a transparent module on the displayarea and/or the display of the display and/or operating device. Further,the display and/or operating device may comprise an evaluation unit, forexample a CPU and/or a microcontroller. Additionally, the display and/oroperating device may include a sensor, such as a camera and/or a touchsensor (e.g., a sensor glass). Furthermore, the display and/or operatingdevice may comprise a voltage source. Here, the first and secondtransparent electrodes, in particular the electrode islands of the firstand/or second matrix, may be connected to the voltage source. Theevaluation unit is configured to close the electric circuit with the twotransparent electrodes and the voltage source via the control ofswitches and/or transistors and/or relays, and thus to ensure that anelectrical voltage is applied to the transparent electrodes for thevibratory excitation of the piezoelectric material. The evaluation unitmay thus also cause a potential to be applied to individual electrodeislands in order to cause excitation of the transparent piezoelectriclayer at the position of the respective electrode island and thus hapticfeedback at any position of the transparent module. The motion sensorand/or the camera may also be connected to the evaluation unit. If anobject is detected by the sensor, for example by touching the surface ofthe module, the evaluation unit may be configured to apply a potentialat this point by connecting the electrodes accordingly.

According to a fourth aspect, the invention relates to a means oftransport comprising a display and/or operating device according to thethird aspect. In this case, the display and/or operating device ispermanently installed in the means of transport and is not designed as aportable device. Possible means of transport within the meaning of theinvention are, for example, automobiles, in particular cars and/ortrucks, and/or aircraft and/or ships and/or motorcycles.

Further details, features and advantages of the invention result fromthe following description and figures, in which:

FIG. 1a shows an embodiment of a module according to the invention,

FIG. 1b shows an embodiment of the display and/or operating deviceaccording to the invention,

FIG. 2 shows an embodiment of the module according to the invention,

FIG. 3 shows an embodiment of the means of transport according to theinvention,

FIG. 4 shows a flow chart of an embodiment of the method according tothe invention,

FIG. 5a is a microscopic representation of a destructive interferenceduring reflection from an embodiment of an electrode island according tothe invention,

FIG. 5b shows a macroscopic representation of a destructive interferenceduring a reflection from an embodiment of an electrode island accordingto the invention,

FIG. 6 shows an embodiment of the module according to the invention,

FIG. 7 shows a cross-section of an embodiment of a module according tothe invention with a hydrophobic coating, and

FIG. 8 is a microscopic representation of destructive interferenceduring reflection from an embodiment of an electrode island according tothe invention.

FIG. 1a shows an embodiment of a module 1 according to the invention.Here, the electrode islands 3 a, 3 b, 3 c of a first matrix of a firsttransparent electrode 3 are arranged in a “W” shape. An electricalvoltage may be applied independently and separately to each of theelectrode islands 3 a, 3 b, 3 c by means of the lines 5 and/orconductive paths 24 a-24 e and the first electrode pads 6 and a circuitarranged thereon. Further, the transparent piezoelectric layer 2 (e.g.,AlScN) is coated with electrode islands 3 a, 3 b, 3 c comprising, forexample, indium tin oxide. Moreover, the dashed circular line shows thesecond transparent electrode 4, which comprises, for example, indium tinoxide. The second transparent electrode 4 may be connected and/orinterconnected to a second electrode pad 7, which is also conceptuallydisposed below the piezoelectric material 2 and is shown forillustrative purposes only. Furthermore, the second transparentelectrode 4 (below the transparent piezoelectric material 2) is arrangedon a transparent substrate 12, for example glass.

FIG. 1b shows an embodiment of the display and/or operating device 10according to the invention. Here, a cross-section A-A of the module 1according to the invention is shown. In addition to the module 1according to the invention, a display 9, which is used for displayingdisplay contents and for interaction by a user, and a sensor 11, inparticular a sensor glass, are shown here. The sensor 11 may, forexample, detect the finger 23 of a user who wishes to interact with thecontent of the display 9 by means of a touch. After this is detected bythe sensor 11, a time-varying electric voltage is applied between therespective electrode island 3 a, 3 b, 3 c and the second transparentelectrode 4. This generates a vibration of the transparent piezoelectriclayer 2 at one or more determined first electrode islands 3 a, therebycausing the transparent substrate 12 to vibrate. Hereby, the userexperiences vibration and/or haptic feedback at the position of hisfinger 23.

FIG. 2 shows an embodiment of the module 1 according to the invention toillustrate the independent and separate switching paths of the electrodeislands 3 a, 3 b, 3 c. Here, the second transparent electrode 4 and theelectrode islands 3 a, 3 b, 3 c are selectively connectable to a voltagesource 13. Furthermore, it is possible that each pair of electrodescomprising electrode island 3 a, 3 b, 3 c and second transparentelectrode 4 has an individual voltage source. By closing one of theswitches S1, S2, S3 one of the electrode islands 3 a, 3 b, 3 c may becontrolled separately. If an electrical voltage is to be applied only toa first electrode island 3 a, the first switch S1 may be closed. If thisis to be done for the first and third electrode islands 3 a, 3 c, thefirst and third switches S1, S3 may be closed, and so on. The closingand opening of the switches S1, S2, S3 may be controlled by means of anevaluation unit 8.

FIG. 3 shows an embodiment of an inventive means of transport 20 (in theform of an automobile) comprising a display and/or operating device 10according to the invention. By means of a sensor 11, for example bymeans of a capacitive sensor, a touch of the module 1 by the user may bedetected. A vibration at a position of the electrode island 3 a, 3 b, 3c may be excited via the evaluation unit 8.

FIG. 4 shows a flow chart of an embodiment of the method according tothe invention for manufacturing a module 1 for a display and/oroperating device 10. In a first step 100, a coating of the transparentsubstrate 12 with a second transparent electrode 4, for example indiumtin oxide, is carried out via a physical gas deposition process. In asecond step 200, the second transparent electrode 4 is patterned. In athird step 300, the second transparent electrode 4 is coated with atransparent piezoelectric material (e.g., AlScN or PZT); for example,via a sputtering and/or sol-gel method. This is followed, in a fourthstep 400, by drying in the case of a sol-gel method. In the fifth step500, the transparent piezoelectric layer 2 is coated by means of aphysical gas deposition (e.g. with indium tin oxide and metals, e.g.silver for the conductive paths 24 a-24 e) to form a matrix withelectrode islands 3 a, 3 b, 3 c, i.e. a first transparent electrode 3 onthe transparent piezoelectric layer 2. The electrode islands 3 a, 3 b, 3c produced in this way have a layer thickness of 100 nm. In a sixth step600, the matrix and the conductive paths 24 a-24 e are patterned toobtain the module 1 according to the invention. Here, the conductivepaths 24 a-24 e have a layer thickness of 150 nm.

FIG. 5a shows a microscopic representation of a destructive interferencegenerated by the layer thickness of the electrode island 3 according tothe invention. Here, the layer thickness of the electrode island is 3λ/4 of the wavelength λ, to be cancelled. The reflected beams R1 and

R2 have a path difference due to the layer thickness of the electrodeisland 3, which enables destructive interference. Moreover, part of theradiation D passes through the electrode island 3 and the transparentpiezoelectric material 2.

FIG. 5b shows a macroscopic representation of a destructive interferencegenerated by the layer thickness of the electrode island according tothe invention. On the left side, a first gloss G1 for an electrodeisland 3 is shown, which has a layer thickness of 100 nm. The left sideis separated, by the separating line S, from the right side, on which asecond gloss G2 for an electrode island 3 with a layer thickness outsidethe range from 95 to 195 nm is shown. FIG. 5b shows that the reflectionintensity at the location of the first gloss G1 is significantly weakerthan the reflection intensity at the location of the second gloss G2.Thus, the electrode island 3 according to the invention with the firstgloss G1 shows better antireflection properties than the electrodeisland 3 with the second gloss G2, which does not have a layer thicknessin the range from 95 nm to 195 nm.

FIG. 6 shows an embodiment of a module 1 according to the invention. Themodule comprises electrode islands 3 a to 3 c, a transparentpiezoelectric layer 2, and a conductive path arrangement 25 comprisingfirst to fifth conductive paths 24 a to 24 e. Here, the electrodeislands 3 a to 3 c, etc., are connected to the conductive paths 24 a to24 e.

FIG. 7 shows a cross-section of the module 1 according to the invention.Here, the electrode islands 3 a, 3 b and the conductive paths 24 a to 24e are additionally coated with a hydrophobic coating 26.

FIG. 8 shows an embodiment of a step-shaped electrode island 3 on thetransparent piezoelectric layer 2. The height of each step is in therange between 95 nm and 195 nm. Thus, destructive interference fordifferent wavelengths from the visible light spectrum may be achieved bythe different heights of the steps.

For a better understanding, the invention will be explained withreference to an embodiment. ITO is deposited on a transparent substrateby sputter deposition. Subsequent patterning is carried out by means oflithography and dry etching. This is followed by sputter deposition ofScAIN onto the existing layer and subsequent patterning by lithographyand dry etching. The next step is the deposition of ITO by sputterdeposition followed by patterning by lithography and dry etching.Finally, the entire surface is coated with a passivation layer (e.g. bylow-pressure chemical vapour deposition (LPCVD) and/or plasma-enhancedchemical vapour deposition (PECVD) and/or sputtering), followed byopening the passivation layer at the points where the two electrodes areelectrically contacted to the drive by lithography and dry etching.

LIST OF REFERENCE NUMERALS

-   1 Module-   2 Transparent piezoelectric layer-   3 First transparent electrode-   3 a First electrode island-   3 b Second electrode island-   3 c Third electrode island-   4 Second transparent electrode-   5 Line-   6 First electrode pad-   7 Second electrode pad-   8 Evaluation unit-   9 Display-   10 Display and/or operating device-   11 Sensor-   12 Transparent substrate-   13 Voltage source-   20 Means of transport-   23 Fingers-   24 a First conductive path-   24 b Second conductive path-   24 c Third conductive path-   24 d Fourth conductive path-   24 e Fifth conductive path-   25 Conductive path arrangement-   26 Hydrophobic coating-   A-A Cross section-   S1 First switch-   S2 Second switch-   S3 Third switch-   100-600 Method acts-   D Transmitted radiation-   G1 First gloss-   G2 Second gloss-   R1 First reflected light beam-   R2 Second reflected light beam-   T Dividing line-   λ Wavelength

1. A module for a display and/or operating device, the module comprisinga first transparent electrode comprising a first matrix of a pluralityof electrode islands; a transparent piezoelectric layer having a firstand a second area; a second transparent electrode; a transparentsubstrate; and a conductive path arrangement with at least one firstconductive path on the transparent piezoelectric layer, wherein thetransparent substrate is coated with the second transparent electrodeand the second transparent electrode is arranged between the transparentsubstrate and the transparent piezoelectric layer, and the first area iscoated with the first transparent electrode and the second area iscoated with the second transparent electrode; and the electrode islandsare arranged electrically insulated from each other on the first area ofthe transparent piezoelectric material, wherein at least the firstconductive path of the conductive path arrangement is electricallyconnected to at least one of the electrode islands, and at least thefirst conductive path and/or at least one of the electrode islands has alayer thickness from 95 nm to 195 nm.
 2. The module according to claim1, wherein the first and second areas are parallel to each other and thesecond transparent electrode comprises a second matrix having aplurality of electrode islands, at least one of said electrode islandshaving a layer thickness from 95 nm to 195 nm.
 3. The module accordingto claim 1, further comprising an anti-scratch coating and/or ahydrophobic coating on the first transparent electrode.
 4. The moduleaccording to claim 1, wherein the electrode islands and/or theconductive path arrangement comprise different layer thicknesses in therange from 95 nm to 195 nm.
 5. The module according to claim 1, whereinat least one of the electrode islands comprises steps of different layerthicknesses in the range from 95 nm to 195 nm.
 6. The module accordingto claim 1, wherein at least one of the electrode islands comprisesgraphene and/or indium tin oxide and/or silver nanowires and/or carbonnanotubes and/or conductive polymers and/or nitrogen-doped diamond-likecarbon and/or carbon nanowires and/or at least one of the conductivepath arrangement comprises silver and/or gold and/or copper and/or acopper alloy.
 7. The module according to claim 1, wherein at least oneof the electrode islands of the first matrix has its own independentcircuit path to its own independent voltage source.
 8. A method ofmanufacturing a module according to claim 1, comprising the steps of:coating a second area of a transparent substrate with a secondtransparent electrode; coating the second electrode with a transparentpiezoelectric layer; and coating of a first area of the transparentpiezoelectric layer with a first transparent electrode in the form of afirst matrix comprising electrode islands arranged electricallyinsulated from one another, at least one of the electrode islands and/orthe conductive path arrangement having a layer thickness from 95 nm to195 nm.
 9. A display and/or operating device comprising a moduleaccording to claim 1, wherein the module is arranged as a transparentmodule on a display of the display and/or operating device.
 10. A meansof transport comprising a display and/or operating device according toclaim 9, wherein the display and/or operating device is fixedly mountedin the means of transport.